Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981560 | Stress-isolated MEMS device comprising substrate having cavity and method of manufacture | Xin Zhang, Christopher Needham, Andrew Proudman, Nikolay Pokrovskiy, George M. Molnar +1 more | 2024-05-14 |
| 11953567 | Magnetic multi-turn sensor and method of manufacture | Peter Meehan, Stephen O'Brien, Jochen Schmitt, Enno Lage | 2024-04-09 |
| 11892467 | Accelerometer with translational motion of masses | Kemiao Jia, Xin Zhang | 2024-02-06 |
| 11805396 | Coherent summation in wireless sensor platforms | Eugene Oh Hwang, Tao Yu, Phillip Nadeau, Rui Zhang | 2023-10-31 |
| 11656077 | Pseudo-extensional mode MEMS ring gyroscope | Igor P. Prikhodko | 2023-05-23 |
| 11415595 | Multiple anchor high frequency accelerometer | Gaurav Vohra, Xin Zhang | 2022-08-16 |
| 11255873 | Increased sensitivity z-axis accelerometer | Xin Zhang, Gaurav Vohra | 2022-02-22 |
| 10759659 | Stress isolation platform for MEMS devices | Xin Zhang, George M. Molnar, Christopher Needham, Kemiao Jia | 2020-09-01 |
| 10545167 | Multiple-axis resonant accelerometers | Xin Zhang, Mehrnaz Motiee | 2020-01-28 |
| 10203352 | Anchor tracking apparatus for in-plane accelerometers and related methods | Xin Zhang, William A. Clark | 2019-02-12 |
| 10167189 | Stress isolation platform for MEMS devices | Xin Zhang, George M. Molnar, Christopher Needham, Kemiao Jia | 2019-01-01 |
| 10073113 | Silicon-based MEMS devices including wells embedded with high density metal | Xin Zhang | 2018-09-11 |
| 9676614 | MEMS device with stress relief structures | Houri Johari-Galle | 2017-06-13 |
| 9410981 | MEMS sensor with dynamically variable reference capacitance | Xin Zhang | 2016-08-09 |
| 9297825 | Tilt mode accelerometer with improved offset and noise performance | Xin Zhang, Howard R. Samuels | 2016-03-29 |
| 8956904 | Apparatus and method of wafer bonding using compatible alloy | John R. Martin, Timothy J. Frey, Christine H. Tsau | 2015-02-17 |
| 8939029 | MEMS sensor with movable Z-axis sensing element | Xin Zhang | 2015-01-27 |
| 8919199 | Apparatus and method for anchoring electrodes in MEMS devices | John A. Geen, Houri Johari-Galle | 2014-12-30 |
| 8794068 | Non-degenerate mode MEMS gyroscope | John A. Geen, Houri Johari-Galle | 2014-08-05 |
| 8516891 | Multi-stage stopper system for MEMS devices | Xin Zhang | 2013-08-27 |
| 8464571 | Systems and methods for determining resonant frequency and quality factor of overdamped systems | Andrew Sparks | 2013-06-18 |
| 8447054 | Microphone with variable low frequency cutoff | Sushil Bharatan, Venkataraman Chandrasekaran, Xin Zhang | 2013-05-21 |
| 8344487 | Stress mitigation in packaged microchips | Xin Zhang, Kevin Chau, Nelson Kuan, Timothy Spooner, Chetan Paydenkar +1 more | 2013-01-01 |
| 8208671 | Microphone with backside cavity that impedes bubble formation | Thomas Chen | 2012-06-26 |
| 8146425 | MEMS sensor with movable z-axis sensing element | Xin Zhang | 2012-04-03 |