Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981560 | Stress-isolated MEMS device comprising substrate having cavity and method of manufacture | Xin Zhang, Christopher Needham, Andrew Proudman, George M. Molnar, Laura Cornelia Popa +1 more | 2024-05-14 |
| 11746004 | Low-parasitic capacitance MEMS inertial sensors and related methods | Charles W. Blackmer, Jeffrey A. Gregory, Bradley C. Kaanta | 2023-09-05 |
| 11279614 | Low-parasitic capacitance MEMS inertial sensors and related methods | Charles W. Blackmer, Jeffrey A. Gregory, Bradley C. Kaanta | 2022-03-22 |