Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981560 | Stress-isolated MEMS device comprising substrate having cavity and method of manufacture | Xin Zhang, Christopher Needham, Andrew Proudman, Nikolay Pokrovskiy, Laura Cornelia Popa +1 more | 2024-05-14 |
| 10759659 | Stress isolation platform for MEMS devices | Xin Zhang, Michael Judy, Christopher Needham, Kemiao Jia | 2020-09-01 |
| 10167189 | Stress isolation platform for MEMS devices | Xin Zhang, Michael Judy, Christopher Needham, Kemiao Jia | 2019-01-01 |
| 9878901 | Fabrication of tungsten MEMS structures | John A. Geen, Gregory S. Davis, Bruce Ma, Kenneth J. Cole, James Timony +1 more | 2018-01-30 |
| 5479316 | Integrated circuit metal-oxide-metal capacitor and method of making same | Mark A. Smrtic, Jerome F. Lapham | 1995-12-26 |