Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10895457 | Differential z-axis resonant accelerometry | — | 2021-01-19 |
| 10545167 | Multiple-axis resonant accelerometers | Xin Zhang, Michael Judy | 2020-01-28 |
| 10451454 | Method and apparatus for driving a multi-oscillator system | Gaurav Vohra, William A. Clark | 2019-10-22 |
| 10173893 | Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS) | Emmanuel P. Quevy, Jeremy R. Hui, Carrie Wing-Zin Low | 2019-01-08 |
| 10168194 | Method and apparatus for driving a multi-oscillator system | Gaurav Vohra, William A. Clark | 2019-01-01 |
| 9509278 | Rotational MEMS resonator for oscillator applications | Aaron J. Caffee, Jeffrey L. Sonntag, Brian G. Drost | 2016-11-29 |
| 9428377 | Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS) | Emmanuel P. Quevy, Jeremy R. Hui, Carrie Wing-Zin Low | 2016-08-30 |
| 8674775 | Out-of-plane resonator | Emmanuel P. Quevy, David H. Bernstein | 2014-03-18 |
| 8629739 | Out-of plane MEMS resonator with static out-of-plane deflection | Emmanuel P. Quevy, David H. Bernstein | 2014-01-14 |
| 8471641 | Switchable electrode for power handling | Emmanuel P. Quevy, Manu Seth | 2013-06-25 |
| 8258893 | Out-of-plane MEMS resonator with static out-of-plane deflection | Emmanuel P. Quevy, David H. Bernstein | 2012-09-04 |
| 7999635 | Out-of plane MEMS resonator with static out-of-plane deflection | Emmanuel P. Quevy, David A. Bernstein | 2011-08-16 |
| 7956517 | MEMS structure having a stress inverter temperature-compensated resonator member | Roger T. Howe, Emmanuel P. Quevy, David H. Bernstein | 2011-06-07 |