Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8111871 | Microphone with pressure relief | Xin Zhang, Kieran P. Harney, Jason W. Weigold | 2012-02-07 |
| 7821084 | Sensor system | John R. Martin, Timothy J. Brosnihan, Xin Zhang | 2010-10-26 |
| 7795723 | Capped sensor | Kevin Chau, Lawrence E. Felton, John A. Geen, John R. Martin | 2010-09-14 |
| 7718457 | Method for producing a MEMS device | Thomas Chen | 2010-05-18 |
| 7720376 | Camera with acceleration sensor | Harvey Weinberg, Christophe Lemaire, Howard R. Samuels | 2010-05-18 |
| 7363816 | Inertial sensor | Howard R. Samuels | 2008-04-29 |
| 7327003 | Sensor system | John R. Martin, Timothy J. Brosnihan, Xin Zhang | 2008-02-05 |
| 7166911 | Packaged microchip with premolded-type package | Maurice S. Karpman, Nicole Hablutzel, Peter Farrell, Lawrence E. Felton, Lewis Long | 2007-01-23 |
| 7134340 | Apparatus and method for anchoring micromachined structures | Howard R. Samuels | 2006-11-14 |
| 7083997 | Bonded wafer optical MEMS process | Timothy J. Brosnihhan | 2006-08-01 |
| 7034393 | Semiconductor assembly with conductive rim and method of producing the same | Susan A. Alie, Bruce Wachtmann, David Kneedler | 2006-04-25 |
| 6964882 | Fabricating complex micro-electromechanical systems using a flip bonding technique | Chang-Han Yun, Lawrence E. Felton, Maurice S. Karpman, John A. Yasaitis, Colin Gormley | 2005-11-15 |
| 6964894 | Apparatus and method of forming a device layer | Bruce Wachtmann | 2005-11-15 |
| 6933163 | Fabricating integrated micro-electromechanical systems using an intermediate electrode layer | Chang-Han Yun, Lawrence E. Felton, Maurice S. Karpman, John A. Yasaitis, Colin Gormley | 2005-08-23 |
| 6931170 | Fiber-attached optical devices with in-plane micromachined mirrors | Chang-Han Yun, Shanti Bhattacharya, Yakov Reznichenko, John R. Martin, Lawrence E. Felton +2 more | 2005-08-16 |
| 6892576 | Reducing offset in accelerometers | Howard R. Samuels, David C. Hollocher, Thor Juneau | 2005-05-17 |
| 6223598 | Suspension arrangement for semiconductor accelerometer | — | 2001-05-01 |
| 6148670 | Apparatus and method for multi-axis capacitive sensing | — | 2000-11-21 |
| 5939633 | Apparatus and method for multi-axis capacitive sensing | — | 1999-08-17 |
| 5542295 | Apparatus to minimize stiction in micromachined structures | Roger T. Howe, H. Jerome Barber | 1996-08-06 |