Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10079150 | Method and apparatus for dry gas phase chemically etching a structure | John J. Neumann, Jr. | 2018-09-18 |
| 9576824 | Etching chamber with subchamber | Edward F. Hinds | 2017-02-21 |
| 8703003 | Selective etching of semiconductor substrate(s) that preserves underlying dielectric layers | David L. Springer, John J. Neumann, Jr. | 2014-04-22 |
| 8377253 | Pulsed etching cooling | David L. Springer | 2013-02-19 |
| 8257602 | Pulsed-continuous etching | David L. Springer | 2012-09-04 |
| 7638435 | Pulsed etching cooling | David L. Springer | 2009-12-29 |
| 6972199 | Method of making a cutting instrument having integrated sensors | Michele Migliuolo | 2005-12-06 |
| 6887337 | Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto | Michele Migliuolo | 2005-05-03 |
| 6653239 | Thermal isolation using vertical structures | — | 2003-11-25 |
| 6610235 | Method of fabricating epidermal abrasion device | Albert P. Pisano | 2003-08-26 |
| 6566725 | Thermal isolation using vertical structures | — | 2003-05-20 |
| 6494882 | Cutting instrument having integrated sensors | Michele Migliuolo | 2002-12-17 |
| 6478974 | Microfabricated filter and shell constructed with a permeable membrane | Roger T. Howe, Albert P. Pisano | 2002-11-12 |
| 6187210 | Epidermal abrasion device with isotropically etched tips, and method of fabricating such a device | Albert P. Pisano | 2001-02-13 |
| 5970998 | Microfabricated cantilever ratchet valve, and method for using same | Neil Hamilton Talbot, John M. Evans | 1999-10-26 |
| 5928207 | Microneedle with isotropically etched tip, and method of fabricating such a device | Albert P. Pisano | 1999-07-27 |
| 5919364 | Microfabricated filter and shell constructed with a permeable membrane | Roger T. Howe, Albert P. Pisano | 1999-07-06 |