Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8703003 | Selective etching of semiconductor substrate(s) that preserves underlying dielectric layers | Kyle S. Lebouitz, John J. Neumann, Jr. | 2014-04-22 |
| 8377253 | Pulsed etching cooling | Kyle S. Lebouitz | 2013-02-19 |
| 8257602 | Pulsed-continuous etching | Kyle S. Lebouitz | 2012-09-04 |
| 7638435 | Pulsed etching cooling | Kyle S. Lebouitz | 2009-12-29 |