Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8637918 | Method and device employing polysilicon scaling | Shenqing Fang, Chun Chen, Wenmei Li, Inkuk Kang, Gang Xue | 2014-01-28 |
| 8198105 | Monitor for variation of critical dimensions (CDs) of reticles | Zhiliu Ma, John K. Wright | 2012-06-12 |
| 8076199 | Method and device employing polysilicon scaling | Shenqing Fang, Chun Chen, Wenmei Li, Inkuk Kang, Gang Xue | 2011-12-13 |
| 7282436 | Plasma treatment for silicon-based dielectrics | Ping Jiang, Ting Tsui, Robert J. Kraft | 2007-10-16 |
| 7244642 | Method to obtain fully silicided gate electrodes | Steven A. Vitale, Freidoon Mehrad | 2007-07-17 |
| 7129162 | Dual cap layer in damascene interconnection processes | Guoqiang Xing, Ping Jiang | 2006-10-31 |
| 6620560 | Plasma treatment of low-k dielectric films to improve patterning | Ping Jiang, Guoqiang Xing, Andrew John McKerrow, Robert J. Kraft | 2003-09-16 |
| 6605536 | Treatment of low-k dielectric films to enable patterning of deep submicron features | Mona Eissa, Guoqiang Xing, Kenneth D. Brennan | 2003-08-12 |