Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9129906 | Self-aligned double spacer patterning process | Tsung-Min Huang, Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue | 2015-09-08 |
| 9123776 | Self-aligned double spacer patterning process | Cheng-Hsiung Tsai, Tsung-Min Huang, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue | 2015-09-01 |
| 9093386 | Spacer-damage-free etching | Tsung-Min Huang, Chung-Ju Lee | 2015-07-28 |
| 8889544 | Dielectric protection layer as a chemical-mechanical polishing stop layer | Hsin-Hsien Lu, Tien-I Bao, Shau-Lin Shue | 2014-11-18 |