Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10297505 | Semiconductor device and fabrication method therefor | You-Hua Chou, Yusuke Oniki | 2019-05-21 |
| 10290716 | Semiconductor device having interfacial layer and high κ dielectric layer | You-Hua Chou, Ming-Chi Huang | 2019-05-14 |
| 10175176 | Method of evaluating characteristics of ion implanted sample | You-Hua Chou | 2019-01-08 |
| 10088761 | Lithography device and apparatus and method for lithography device | You-Hua Chou | 2018-10-02 |
| 9892954 | Wafer processing system using multi-zone chuck | Nai-Han Cheng, Chi-Ming Yang, You-Hua Chou, Chin-Hsiang Lin | 2018-02-13 |
| 9776216 | Dispensing apparatus and dispensing method | Weibo Yu, Wen-Yu Ku, Chin-Hsiang Lin | 2017-10-03 |
| 9685330 | Manufacturing method of semiconductor device | You-Hua Chou | 2017-06-20 |
| 9579697 | System and method of cleaning FOUP | Jyh-Shiou Hsu, Chi-Ming Yang | 2017-02-28 |
| 9536757 | Device manufacturing cleaning process using vaporized solvent | Albert Chen, Chi-Ming Yang | 2017-01-03 |
| 9460949 | Ultra-low oxygen and humility loadport and stocker system | You-Hua Chou, Chih-Wei Huang | 2016-10-04 |
| 9412850 | Method of trimming fin structure | You-Hua Chou | 2016-08-09 |
| 9299593 | Semiconductor device cleaning method and apparatus | Ming-Hsi Yeh, Ying-Hsueh Chang Chien, Chi-Ming Yang, Chin-Hsiang Lin | 2016-03-29 |
| 9272315 | Mechanisms for controlling gas flow in enclosure | You-Hua Chou, Yii-Cheng Lin | 2016-03-01 |
| 8709528 | Wafer processing method and system using multi-zone chuck | Nai-Han Cheng, Chi-Ming Yang, You-Hua Chou, Chin-Hsiang Lin | 2014-04-29 |
| 8657963 | In-situ backside cleaning of semiconductor substrate | Ming-Hsi Yeh, Ying-Hsueh Chang Chien, Chi-Ming Yang, Chin-Hsiang Lin | 2014-02-25 |
| 6004864 | Ion implant method for forming trench isolation for integrated circuit devices | Ji-Chung Huang, Han-Liang Tseng, Chia-Hsiang Chen | 1999-12-21 |
| 5840607 | Method of forming undoped/in-situ doped/undoped polysilicon sandwich for floating gate application | Jun-Ker Yeh, Long-Sheng Yeou, Siu-han Liao | 1998-11-24 |
| 5704986 | Semiconductor substrate dry cleaning method | Chien-Fong Chen, Chia-Chun Cheng, Chi Chang | 1998-01-06 |