Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394602 | Wafer processing method | Chien-Kuo Huang, Shih-Wen Huang, Joung-Wei Liou, Fei-Fan Chen | 2025-08-19 |
| 10741366 | Process chamber and wafer processing method | Chien-Kuo Huang, Shih-Wen Huang, Joung-Wei Liou, Fei-Fan Chen | 2020-08-11 |
| 10669625 | Pumping liner for chemical vapor deposition | Cheng-Hsiung Liu, Chun-Hao Hsu, Yu-Yun Peng, Chih-Yuan Yao, Keng-Chu Lin | 2020-06-02 |
| 10008367 | Gas diffuser unit, process chamber and wafer processing method | Chien-Kuo Huang, Shih-Wen Huang, Joung-Wei Liou, Fei-Fan Chen | 2018-06-26 |
| 9048268 | Method and equipment for removing photoresist residue after dry etch | Mu-Chen Chen, Yi-Tse Huang, Wei-Fan Liao, Han-Ti Hsiaw | 2015-06-02 |
| 8889435 | Plasma density control | Wen-Sheng Wu, Fei-Fan Chen, Hua-Sheng Chiu | 2014-11-18 |
| 6463782 | Self-centering calibration tool and method of calibrating | Jan-Mei Fan, Su WANG, Hui-Lung Hon | 2002-10-15 |