Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9048268 | Method and equipment for removing photoresist residue after dry etch | Yi-Tse Huang, Wei-Fan Liao, Han-Ti Hsiaw, Chia-I Shen | 2015-06-02 |
MC
Mu-Chen Chen
Overall (All Time): #3,055,325 of 4,157,543Top 75%
1
Patents All Time