Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215414 | Shutter disc for a semiconductor processing tool | Yi-Lin Wang, Chin-Szu Lee, Yi-Chao Chang, Zih-Shou MUE | 2025-02-04 |
| 11827970 | Shutter disc for a semiconductor processing tool | Yi-Lin Wang, Chin-Szu Lee, Yi-Chao Chang, Zih-Shou MUE | 2023-11-28 |
| 11022437 | Leveling sensor, load port including the same, and method of leveling a load port | Yi-Lin Wang, Jung-Tang Wu, Chin-Szu Lee | 2021-06-01 |
| 10533852 | Leveling sensor, load port including the same, and method of leveling a load port | Yi-Lin Wang, Jung-Tang Wu, Chin-Szu Lee | 2020-01-14 |
| 8889435 | Plasma density control | Wen-Sheng Wu, Fei-Fan Chen, Chia-I Shen | 2014-11-18 |