Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215414 | Shutter disc for a semiconductor processing tool | Yi-Lin Wang, Chin-Szu Lee, Hua-Sheng Chiu, Zih-Shou MUE | 2025-02-04 |
| 11827970 | Shutter disc for a semiconductor processing tool | Yi-Lin Wang, Chin-Szu Lee, Hua-Sheng Chiu, Zih-Shou MUE | 2023-11-28 |
| 10161060 | Gas-supply system and method | Pang-Ping Lo, Yi-Chen Wang, Yung-Long Chen, Chun-Feng Hsu | 2018-12-25 |