Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394602 | Wafer processing method | Shih-Wen Huang, Joung-Wei Liou, Chia-I Shen, Fei-Fan Chen | 2025-08-19 |
| 11053584 | System and method for supplying a precursor for an atomic layer deposition (ALD) process | Bor Chiuan Hsieh, Tai-Chun Huang, Kuang-Yuan Hsu, Tze-Liang Lee | 2021-07-06 |
| 10741366 | Process chamber and wafer processing method | Shih-Wen Huang, Joung-Wei Liou, Chia-I Shen, Fei-Fan Chen | 2020-08-11 |
| 10443127 | System and method for supplying a precursor for an atomic layer deposition (ALD) process | Bor Chiuan Hsieh, Tai-Chun Huang, Kuang-Yuan Hsu, Tze-Liang Lee | 2019-10-15 |
| 10011532 | Remote plasma system and method | Fei-Fan Chen, Wen-Sheng Wu | 2018-07-03 |
| 10008367 | Gas diffuser unit, process chamber and wafer processing method | Shih-Wen Huang, Joung-Wei Liou, Chia-I Shen, Fei-Fan Chen | 2018-06-26 |
| 8944003 | Remote plasma system and method | Fei-Fan Chen, Wen-Sheng Wu | 2015-02-03 |
| 8158546 | Transparent aqua-based nano sol-gel composition and method of applying the same | Wen-Chuan Liu, Shiaw-Tseh Chiang | 2012-04-17 |
| 7936117 | Structure of spark plug | — | 2011-05-03 |