Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942764 | Arc-sprayed shield for pre-sputter etching chamber | Chin-Shien Yang, Chuan-Huai Chen | 2005-09-13 |
| 6577926 | Method of detecting and controlling in-situ faults in rapid thermal processing systems | Shih-Hui Chang, Kuo-Hsien Cheng, Wen Zen Chiu | 2003-06-10 |
| 6436253 | Sputter etching chamber with improved uniformity | Chin-Shien Yang, Chuan-Huai Chen | 2002-08-20 |
| 6358761 | Silicon monitor for detection of H2O2 in acid bath | Hui-Ju Yoo, Szu-An Wu, Shiow-Jye Jenq | 2002-03-19 |
| 6342135 | Sputter etching chamber with improved uniformity | Chin-Shien Yang, Chuan-Huai Chen | 2002-01-29 |
| 6302948 | Textile ink-jet printing-purpose disperse dye micro-emulsion agent | Chong-Yu Chen, Wen-Tung Chen, Shiau-Yin Chang | 2001-10-16 |
| 6060374 | Monitor for molecular nitrogen during silicon implant | Szu-An Wu | 2000-05-09 |
| 6037204 | Silicon and arsenic double implanted pre-amorphization process for salicide technology | Shou-Zen Chang, Chaochieh Tsai, Chin-Hsiung Ho | 2000-03-14 |
| 6030508 | Sputter etching chamber having a gas baffle with improved uniformity | Chin-Shien Yang, Chuan-Huai Chen | 2000-02-29 |
| 6030863 | Germanium and arsenic double implanted pre-amorphization process for salicide technology | Shou-Zen Chang, Chaochieh Tsai, Chi-Ming Yang | 2000-02-29 |
| 5863983 | Manufacturing method for blocked aqueous dispersion of polyurethanes | Jongfu Wu, Wen-Tung Chen | 1999-01-26 |