Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942764 | Arc-sprayed shield for pre-sputter etching chamber | Cheng-Kun Lin, Chin-Shien Yang | 2005-09-13 |
| 6436253 | Sputter etching chamber with improved uniformity | Chin-Shien Yang, Cheng-Kun Lin | 2002-08-20 |
| 6342135 | Sputter etching chamber with improved uniformity | Chin-Shien Yang, Cheng-Kun Lin | 2002-01-29 |
| 6030508 | Sputter etching chamber having a gas baffle with improved uniformity | Chin-Shien Yang, Cheng-Kun Lin | 2000-02-29 |