Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362281 | Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof | Tsung-Ling Tsai, Shen-Nan Lee, Mrunal A. Khaderbad, Chung-Wei Hsu, Teng-Chun Tsai | 2025-07-15 |
| 12269141 | Fabrication of a polishing pad for chemical mechanical polishing | An-Hsuan Lee, Ming-Shiuan She, Chun-Hung Liao, Shen-Nan Lee, Teng-Chun Tsai | 2025-04-08 |
| 12261055 | Slurry compositions for chemical mechanical planarization | An-Hsuan Lee, Chun-Hung Liao, Shen-Nan Lee, Teng-Chun Tsai, Huang-Lin Chao | 2025-03-25 |
| 12176217 | Method for manufacturing a semiconductor using slurry | Chun-Hung Liao, Chung-Wei Hsu, Tsung-Ling Tsai, An-Hsuan Lee, Shen-Nan Lee +2 more | 2024-12-24 |
| 12024651 | Chemical mechanical polishing slurry composition and method of polishing metal layer | Chun-Hung Liao, An-Hsuan Lee, Shen-Nan Lee, Teng-Chun Tsai, Huang-Lin Chao | 2024-07-02 |
| 11942373 | Fin isolation structure for FinFET and method of forming the same | Chu-An Lee, Peng-Chung Jangjian, Chun-Wen Hsiao, Teng-Chun Tsai, Huang-Lin Chao | 2024-03-26 |
| 11776910 | Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof | Tsung-Ling Tsai, Shen-Nan Lee, Mrunal A. Khaderbad, Chung-Wei Hsu, Teng-Chun Tsai | 2023-10-03 |
| 11752592 | Slurry enhancement for polishing system | Chun-Hung Liao, An-Hsuan Lee, Huang-Lin Chao | 2023-09-12 |
| 11756825 | Semiconductor structure with oxidized ruthenium | Shen-Nan Lee, Teng-Chun Tsai, Chu-An Lee, Chun-Hung Liao, Tsung-Ling Tsai | 2023-09-12 |
| 11697183 | Fabrication of a polishing pad for chemical mechanical polishing | An-Hsuan Lee, Ming-Shiuan She, Chun-Hung Liao, Shen-Nan Lee, Teng-Chun Tsai | 2023-07-11 |
| 11688607 | Slurry | Chun-Hung Liao, Chung-Wei Hsu, Tsung-Ling Tsai, An-Hsuan Lee, Shen-Nan Lee +2 more | 2023-06-27 |
| 11688644 | Fin isolation structure for FinFET and method of forming the same | Chu-An Lee, Peng-Chung Jangjian, Chun-Wen Hsiao, Teng-Chun Tsai, Huang-Lin Chao | 2023-06-27 |
| 11525072 | Materials and methods for chemical mechanical polishing of ruthenium-containing materials | An-Hsuan Lee, Shen-Nan Lee, Chun-Hung Liao, Teng-Chun Tsai, Huang-Lin Chao | 2022-12-13 |
| 11495471 | Slurry compositions for chemical mechanical planarization | An-Hsuan Lee, Chun-Hung Liao, Shen-Nan Lee, Teng-Chun Tsai, Huang-Lin Chao | 2022-11-08 |
| 11389928 | Method for conditioning polishing pad | Shen-Nan Lee, Te-Chien Hou, Teng-Chun Tsai, Chung-Wei Hsu | 2022-07-19 |
| 11267987 | Chemical mechanical polishing slurry composition and method of polishing metal layer | Chun-Hung Liao, An-Hsuan Lee, Shen-Nan Lee, Teng-Chun Tsai, Huang-Lin Chao | 2022-03-08 |
| 11120995 | Method for forming multi-layer mask | Chung-Wei Hsu, Yu-Chung Su, Shen-Nan Lee, Tsung-Ling Tsai, Teng-Chun Tsai | 2021-09-14 |
| 11004691 | Mechanism for manufacturing semiconductor device | Shen-Nan Lee, Chung-Wei Hsu, Tsung-Ling Tsai, Teng-Chun Tsai | 2021-05-11 |
| 11004794 | Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof | Tsung-Ling Tsai, Shen-Nan Lee, Mrunal A. Khaderbad, Chung-Wei Hsu, Teng-Chun Tsai | 2021-05-11 |
| 10998239 | Fin isolation structure for FinFET and method of forming the same | Chu-An Lee, Peng-Chung Jangjian, Chun-Wen Hsiao, Teng-Chun Tsai, Huang-Lin Chao | 2021-05-04 |
| 10964549 | Wafer polishing with separated chemical reaction and mechanical polishing | Shen-Nan Lee, Teng-Chun Tsai, Chu-An Lee, Chun-Hung Liao, Huang-Lin Chao | 2021-03-30 |
| 10920105 | Materials and methods for chemical mechanical polishing of ruthenium-containing materials | An-Hsuan Lee, Shen-Nan Lee, Chun-Hung Liao, Teng-Chun Tsai, Huang-Lin Chao | 2021-02-16 |
| 10847410 | Ruthenium-containing semiconductor structure and method of manufacturing the same | Shen-Nan Lee, Teng-Chun Tsai, Chu-An Lee, Chun-Hung Liao, Tsung-Ling Tsai | 2020-11-24 |
| 10727076 | Slurry and manufacturing semiconductor using the slurry | Chun-Hung Liao, Chung-Wei Hsu, Tsung-Ling Tsai, Chu-An Lee, Shen-Nan Lee +2 more | 2020-07-28 |
| 10714395 | Fin isolation structure for FinFET and method of forming the same | Chu-An Lee, Peng-Chung Jangjian, Chun-Wen Hsiao, Teng-Chun Tsai, Huang-Lin Chao | 2020-07-14 |