Issued Patents All Time
Showing 126–150 of 153 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537736 | Patten formation method | Shinji Kishimura, Akiko Katsuyama | 2003-03-25 |
| 6531259 | Pattern formation method and pattern formation material | Shinji Kishimura, Akiko Katsuyama | 2003-03-11 |
| 6528240 | Pattern formation method | Shinji Kishimura, Akiko Katsuyama | 2003-03-04 |
| 6521393 | Pattern formation method | Shinji Kishimura, Akiko Katsuyama | 2003-02-18 |
| 6511786 | Pattern formation material and pattern formation method | Shinji Kishimura, Masayuki Endo, Masamitsu Shirai, Masahiro Tsunooka | 2003-01-28 |
| 6511787 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Jun Watanabe, Yoshio Kawai, Masayuki Endo +5 more | 2003-01-28 |
| 6475706 | Pattern formation method | Shinji Kishimura, Akiko Katsuyama | 2002-11-05 |
| 6461790 | Polymers, chemical amplification resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe, Yuji Harada, Mutsuo Nakashima, Shinji Kishimura | 2002-10-08 |
| 6444395 | Pattern formation material and method | Shinji Kishimura, Akiko Katsuyama | 2002-09-03 |
| 6429143 | Pattern formation method | Masayuki Endo | 2002-08-06 |
| 5741628 | Method of forming micropatterns by having a resist film absorb water | Takahiro Matsuo, Kazuhiro Yamashita, Masayuki Endo | 1998-04-21 |
| 5679500 | Method of forming micropatterns utilizing silylation and overall energy beam exposure | Takahiro Matsuo, Kazuhiro Yamashita, Masayuki Endo | 1997-10-21 |
| 5658711 | Method of forming micropatterns | Takahiro Matsuo, Kazuhiro Yamashita, Masayuki Endo | 1997-08-19 |
| 5518579 | Method for forming a fine pattern | Akiko Katsuyama, Kazuhiro Yamashita | 1996-05-21 |
| 5401932 | Method of producing a stencil mask | Kazuhiko Hashimoto, Masayuki Endo | 1995-03-28 |
| 5300404 | Process for forming a positive pattern through deep ultraviolet exposure, heat treatment and development with TMAH solution containing an alcohol to improve adhesion | Yoshiyuki Tani | 1994-04-05 |
| 5275921 | Pattern forming process | Taichi Koizumi, Yoshiyuki Tani | 1994-01-04 |
| 5252435 | Method for forming pattern | Yoshiyuki Tani | 1993-10-12 |
| 4910123 | Pattern forming method | Masayuki Endo, Kazufumi Ogawa | 1990-03-20 |
| 4849323 | Pattern forming method using contrast enhanced material | Masayuki Endo, Kazufumi Ogawa | 1989-07-18 |
| 4841341 | Integrator for an exposure apparatus or the like | Kazufumi Ogawa, Masayuki Endo, Ken Ishihara | 1989-06-20 |
| 4840872 | Pattern forming method by use of X-ray exposure | Masayuki Endo, Kazufumi Ogawa | 1989-06-20 |
| 4812880 | Exposure apparatus | Kazufumi Ogawa, Masayuki Endo, Takeshi Ishihara | 1989-03-14 |
| 4805002 | Exposure apparatus | Masayuki Endo, Kazufumi Ogawa, Takeshi Ishihara | 1989-02-14 |
| 4805000 | Exposure apparatus | Kazufumi Ogawa, Masayuki Endo, Takeshi Ishihara | 1989-02-14 |