Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6673523 | Pattern formation method | Shinji Kishimura, Masaru Sasago | 2004-01-06 |
| 6537736 | Patten formation method | Shinji Kishimura, Masaru Sasago | 2003-03-25 |
| 6531259 | Pattern formation method and pattern formation material | Shinji Kishimura, Masaru Sasago | 2003-03-11 |
| 6528240 | Pattern formation method | Shinji Kishimura, Masaru Sasago | 2003-03-04 |
| 6521393 | Pattern formation method | Shinji Kishimura, Masaru Sasago | 2003-02-18 |
| 6475706 | Pattern formation method | Shinji Kishimura, Masaru Sasago | 2002-11-05 |
| 6444395 | Pattern formation material and method | Shinji Kishimura, Masaru Sasago | 2002-09-03 |
| 6335143 | Resist composition containing specific cross-linking agent | Motoshige Sumino, Hirotoshi Fujie, Masayuki Endo | 2002-01-01 |
| 6258972 | Pattern formation method and surface treating agent | Satoko Nakaoka, Masayuki Endo, Hiromi Ohsaki | 2001-07-10 |
| 6168909 | Material and method for forming pattern | — | 2001-01-02 |
| 6143472 | Resist composition and a method for formation of a pattern using the composition | Motoshige Sumino | 2000-11-07 |
| 6054255 | Pattern formation method and surface treating agent | Satoko Nakaoka, Masayuki Endo, Hiromi Ohsaki | 2000-04-25 |
| 5866302 | Pattern formation method | Koji Matsuoka, Takahiro Matsuo, Masayuki Endo | 1999-02-02 |
| 5856069 | Method for forming pattern | Masayuki Endo | 1999-01-05 |
| 5846692 | Pattern formation method | Masayuki Endo | 1998-12-08 |
| 5780206 | Fine pattern forming process using a resist composition sensitive to deep ultraviolet light | Fumiyoshi Urano, Takanori Yasuda, Kazuhiro Yamashita | 1998-07-14 |
| 5756262 | Method for forming pattern | Masayuki Endo | 1998-05-26 |
| 5695910 | Resist composition for deep ultraviolet light | Fumiyoshi Urano, Takanori Yasuda, Kazuhiro Yamashita | 1997-12-09 |
| 5558971 | Resist material | Fumiyoshi Urano, Takaai Negishi, Masayuki Endo | 1996-09-24 |
| 5558976 | Pattern formation method | Fumiyoshi Urano, Takaaki Negishi, Masayuki Endo | 1996-09-24 |
| 5518579 | Method for forming a fine pattern | Masaru Sasago, Kazuhiro Yamashita | 1996-05-21 |