Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE40211 | Diazodisulfones | Fumiyoshi Urano, Masaaki Nakahata, Keiji Oono | 2008-04-01 |
| 6716573 | Resist Composition | Tsuneaki Maesawa, Yasuyoshi Mori | 2004-04-06 |
| 6656660 | Resist composition | Fumiyoshi Urano, Naoki Takeyama, Koji Ichikawa | 2003-12-02 |
| 6432608 | Resist composition | Tsuneaki Maesawa, Yasuyoshi Mori | 2002-08-13 |
| 6335143 | Resist composition containing specific cross-linking agent | Motoshige Sumino, Akiko Katsuyama, Masayuki Endo | 2002-01-01 |
| 6303264 | Agent for reducing the substrate dependence of resist | Tohru Souki, Yukiko Uehara | 2001-10-16 |
| 6033826 | Polymer and resist material | Fumiyoshi Urano, Keiji Oono | 2000-03-07 |
| 5976759 | Polymer composition and resist material | Fumiyoshi Urano, Keiji Oono | 1999-11-02 |
| 5670299 | Pattern formation process | Fumiyoshi Urano, Keiji Oono, Takaaki Negishi | 1997-09-23 |
| 5627006 | Resist material | Fumiyoshi Urano, Keiji Oono | 1997-05-06 |
| 5468589 | Resist material and pattern formation process | Fumiyoshi Urano, Keiji Oono, Takaaki Negishi | 1995-11-21 |
| 5350660 | Chemical amplified resist material containing photosensitive compound capable of generating an acid and specific polystyrene copolymer having functional groups that become alkali-soluble under an acid atmosphere | Fumiyoshi Urano, Masaaki Nakahata, Keiji Oono | 1994-09-27 |
| 5216135 | Diazodisulfones | Fumiyoshi Urano, Masaaki Nakahata, Keiji Oono | 1993-06-01 |