Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7264912 | Method of producing photoresist | Takeshi Hioki, Kota Tokuhara | 2007-09-04 |
| 7176143 | Method for evaluating solution for a coating film for semiconductors | Satoshi Yamamoto | 2007-02-13 |
| 5368987 | Process for producing resist composition | Hiroshi Takagaki, Ayako Ida | 1994-11-29 |
| 5360696 | Resist composition | Hiroshi Takagaki, Ayako Ida | 1994-11-01 |
| 5290656 | Resist composition, novel phenol compound and quinone diazide sulfonic acid ester of novel phenol compound | Yasunori Uetani, Makoto Hanabata, Hirotoshi Nakanishi, Koji Kuwana, Fumio Oi +1 more | 1994-03-01 |
| 5080997 | Process for preparing a positive resist composition by mixing the condensation product of a quinone diazide sulfonyl halogenide and a phenol with a resin solution without isolating the condensation product from the crude mixture | Takeshi Hioki, Koji Kuwana, Jun Tomioka, Hirotoshi Nakanishi, Yasunori Uetani +1 more | 1992-01-14 |
| 5059507 | Positive resist composition containing quinone diazide sulfonic acid ester of a phenol compound and an alkali soluble resin | Yasunori Uetani, Makoto Hanabata, Hirotoshi Nakanishi, Koji Kuwana, Fumio Oi | 1991-10-22 |