Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837297 | Tray and wafer holding apparatus | Norio Shiraiwa, Tadayoshi Yoshikawa, Naoto Watanabe, Miki Saito | 2017-12-05 |
| 9252039 | Electrostatic chuck apparatus | Norio Shiraiwa, Jiro Kawai | 2016-02-02 |
| 9120704 | Dielectric layer for electrostatic chuck and electrostatic chuck | Kouta Tsutsumi, Mitsuyoshi Nagano, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito +3 more | 2015-09-01 |
| 8686743 | Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus | Yuji Furumura, Naomi Mura, Tadayoshi Yoshikawa, Hiroshi Yonekura | 2014-04-01 |
| 8641825 | Substrate temperature regulation fixed apparatus | Hiroshi Yonekura, Miki Saito | 2014-02-04 |
| 8505928 | Substrate temperature control fixing apparatus | Miki Saito, Tadayoshi Yoshikawa | 2013-08-13 |
| 8441772 | Substrate for electrostatic chuck and electrostatic chuck | Tadayoshi Yoshikawa, Naoto Watanabe | 2013-05-14 |
| 8199454 | Electrostatic chuck and substrate temperature adjusting-fixing device | Tomoaki Koyama | 2012-06-12 |
| 8068326 | Electrostatic chuck and substrate temperature control fixing apparatus | Tomoaki Koyama | 2011-11-29 |
| 8023248 | Electrostatic chuck | Hiroshi Yonekura | 2011-09-20 |
| 5777838 | Electrostatic chuck and method of attracting wafer | Kojiro Takahashi, Takahiko Suzuki, Ryuichi Fukunishi | 1998-07-07 |