Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9120704 | Dielectric layer for electrostatic chuck and electrostatic chuck | Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito +3 more | 2015-09-01 |
| 9079800 | Composite ceramic body, and component member for semiconductor manufacturing apparatus | Ryou Matsuo, Mitsuyoshi Nagano | 2015-07-14 |