Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521885 | Substrate fixing device | Miki Saito, Takahiko Suzuki, Shuzo Aoki | 2022-12-06 |
| 9837297 | Tray and wafer holding apparatus | Koki Tamagawa, Norio Shiraiwa, Naoto Watanabe, Miki Saito | 2017-12-05 |
| 9120704 | Dielectric layer for electrostatic chuck and electrostatic chuck | Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Miki Saito +3 more | 2015-09-01 |
| 8686743 | Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus | Yuji Furumura, Naomi Mura, Koki Tamagawa, Hiroshi Yonekura | 2014-04-01 |
| 8505928 | Substrate temperature control fixing apparatus | Miki Saito, Koki Tamagawa | 2013-08-13 |
| 8441772 | Substrate for electrostatic chuck and electrostatic chuck | Koki Tamagawa, Naoto Watanabe | 2013-05-14 |
| 4230762 | Asphalt water-proofing material | Hajime Iwasaki, Kuninori Mizuta, Yoshinori Kobayashi, Kyouzi Muraoka | 1980-10-28 |