Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12291780 | Tray and substrate fixing device | Kazuya Takada | 2025-05-06 |
| 11862501 | Electrostatic chuck and substrate fixing device | Kazuya Takada | 2024-01-02 |
| 11037811 | Electrostatic chuck and semiconductor/liquid crystal manufacturing equipment | — | 2021-06-15 |
| 10847401 | Wafer holding apparatus and baseplate structure | Syuuichi Andou, Kenji Takatsuka, Katsuhiro KOSUGA | 2020-11-24 |
| 10600669 | Substrate fixture and substrate fixing device | — | 2020-03-24 |
| 10304718 | Electrostatic chuck device | — | 2019-05-28 |
| 10147628 | Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus | Jiro Kawai | 2018-12-04 |
| 9837297 | Tray and wafer holding apparatus | Koki Tamagawa, Tadayoshi Yoshikawa, Naoto Watanabe, Miki Saito | 2017-12-05 |
| 9660557 | Electrostatic chuck and method for manufacturing the electrostatic chuck | Jiro Kawai | 2017-05-23 |
| 9252039 | Electrostatic chuck apparatus | Koki Tamagawa, Jiro Kawai | 2016-02-02 |
| 9240340 | Electrostatic chuck | Jiro Kawai | 2016-01-19 |
| 9120704 | Dielectric layer for electrostatic chuck and electrostatic chuck | Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Tadayoshi Yoshikawa, Miki Saito +3 more | 2015-09-01 |
| 8724289 | Substrate temperature adjusting-fixing device | Yuichi Hata | 2014-05-13 |
| 8023246 | Electrostatic chuck and method of manufacturing the same | Takeshi Kobayashi, Yuichi Hata, Naoto Watanabe | 2011-09-20 |
| 7483256 | Electrostatic chuck | Yuichi Hata, Naoto Watanabe | 2009-01-27 |