Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147628 | Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus | Norio Shiraiwa | 2018-12-04 |
| 9887117 | Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus | Yoshifumi Katayama | 2018-02-06 |
| 9660557 | Electrostatic chuck and method for manufacturing the electrostatic chuck | Norio Shiraiwa | 2017-05-23 |
| 9252039 | Electrostatic chuck apparatus | Norio Shiraiwa, Koki Tamagawa | 2016-02-02 |
| 9240340 | Electrostatic chuck | Norio Shiraiwa | 2016-01-19 |