Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521885 | Substrate fixing device | Tadayoshi Yoshikawa, Takahiko Suzuki, Shuzo Aoki | 2022-12-06 |
| 9837297 | Tray and wafer holding apparatus | Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Naoto Watanabe | 2017-12-05 |
| 9120704 | Dielectric layer for electrostatic chuck and electrostatic chuck | Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa +3 more | 2015-09-01 |
| 8641825 | Substrate temperature regulation fixed apparatus | Hiroshi Yonekura, Koki Tamagawa | 2014-02-04 |
| 8505928 | Substrate temperature control fixing apparatus | Tadayoshi Yoshikawa, Koki Tamagawa | 2013-08-13 |