Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5777838 | Electrostatic chuck and method of attracting wafer | Koki Tamagawa, Kojiro Takahashi, Takahiko Suzuki | 1998-07-07 |
RF
Ryuichi Fukunishi
Overall (All Time): #3,689,581 of 4,157,543Top 90%
1
Patents All Time