Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8199454 | Electrostatic chuck and substrate temperature adjusting-fixing device | Koki Tamagawa | 2012-06-12 |
| 8068326 | Electrostatic chuck and substrate temperature control fixing apparatus | Koki Tamagawa | 2011-11-29 |