Issued Patents All Time
Showing 26–50 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8268528 | Resist composition and patterning process | Jun Hatakeyama, Koji Hasegawa, Kazunori Maeda, Tomohiro Kobayashi | 2012-09-18 |
| 8252504 | Polymer, resist composition, and patterning process | Jun Hatakeyama, Kazunori Maeda, Tomohiro Kobayashi | 2012-08-28 |
| 8158330 | Resist protective coating composition and patterning process | Jun Hatakeyama, Koji Hasegawa, Satoshi Shinachi | 2012-04-17 |
| 8101335 | Resist composition and patterning process | Jun Hatakeyama, Kazunori Maeda, Koji Hasegawa, Satoshi Shinachi | 2012-01-24 |
| 8088537 | Resist top coat composition and patterning process | Jun Hatakeyama | 2012-01-03 |
| 8057981 | Resist composition, resist protective coating composition, and patterning process | Jun Hatakeyama, Kazunori Maeda, Tomohiro Kobayashi | 2011-11-15 |
| 8043788 | Resist composition and patterning process | Tomohiro Kobayashi, Jun Hatakeyama | 2011-10-25 |
| 7771914 | Resist composition and patterning process | Jun Hatakeyama, Takao Yoshihara, Wataru Kusaki | 2010-08-10 |
| 7771913 | Resist composition and patterning process using the same | Tatsushi Kaneko, Jun Hatakeyama | 2010-08-10 |
| 7759047 | Resist protective film composition and patterning process | Jun Hatakeyama, Takeru Watanabe | 2010-07-20 |
| 7670750 | Polymer, resist protective coating material, and patterning process | Jun Hatakeyama, Koji Hasegawa | 2010-03-02 |
| 7666967 | Ester compound, polymer, resist composition, and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Kazuhiko Maeda +2 more | 2010-02-23 |
| 7666572 | Resist top coat composition and patterning process | Jun Hatakeyama | 2010-02-23 |
| 7642034 | Polymer, resist protective coating material, and patterning process | Jun Hatakeyama, Koji Hasegawa | 2010-01-05 |
| 7622242 | Resist composition and patterning process | Jun Hatakeyama, Koji Hasegawa, Takeru Watanabe | 2009-11-24 |
| 7598016 | Resist composition and patterning process | Tomohiro Kobayashi, Jun Hatakeyama | 2009-10-06 |
| 7592407 | Polymerizable fluorinated compound, making method, polymer, resist composition and patterning process | Jun Hatakeyama, Takeru Watanabe, Takeshi Kinsho | 2009-09-22 |
| 7569323 | Resist protective coating material and patterning process | Jun Hatakeyama, Yoshio Kawai, Masayuki Endo, Masaru Sasago, Haruhiko Komoriya +3 more | 2009-08-04 |
| 7537880 | Polymer, resist composition, and patterning process | Jun Hatakeyama, Takao Yoshihara, Wataru Kusaki, Tomohiro Kobayashi, Koji Hasegawa | 2009-05-26 |
| 7514204 | Resist composition and patterning process | Jun Hatakeyama, Wataru Kusaki, Takao Yoshihara | 2009-04-07 |
| 7488567 | Polymer, resist composition and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Kazuhiko Maeda +2 more | 2009-02-10 |
| 7455952 | Patterning process and resist overcoat material | Jun Hatakeyama | 2008-11-25 |
| 7378218 | Polymer, resist composition and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Kazuhiko Maeda +2 more | 2008-05-27 |
| 7332616 | Polymerizable compound, polymer, positive-resist composition, and patterning process using the same | Jun Hatakeyama, Yoshio Kawai | 2008-02-19 |
| 7276623 | Polymerizable ester compounds | Jun Hatakeyama, Yoshio Kawai, Kazuhiko Maeda, Haruhiko Komoriya, Michitaka Ootani | 2007-10-02 |