Issued Patents All Time
Showing 51–75 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7241553 | Polymer, resist composition, and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2007-07-10 |
| 7232641 | Polymerizable compound, polymer, positive-resist composition, and patterning process using the same | Jun Hatakeyama, Yoshio Kawai | 2007-06-19 |
| 7189493 | Polymer, positive resist composition, and patterning process using the same | Jun Hatakeyama, Yoshio Kawai | 2007-03-13 |
| 7169869 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2007-01-30 |
| 7125643 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7125642 | Sulfonates, polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7125641 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7078147 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura | 2006-07-18 |
| 7067231 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-06-27 |
| 7012161 | Compound, fluorine-containing polymerizable cyclic olefin compound | Takeru Watanabe, Takeshi Kinsho | 2006-03-14 |
| 7005228 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +4 more | 2006-02-28 |
| 7001707 | Resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-02-21 |
| 6946235 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-09-20 |
| 6933095 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +4 more | 2005-08-23 |
| 6916592 | Esters, polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-07-12 |
| 6878501 | Polymer, chemically amplified resist composition and patterning process | Jun Hatakeyama, Jun Watanabe | 2005-04-12 |
| 6875556 | Resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-04-05 |
| 6872514 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-03-29 |
| 6866983 | Resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai | 2005-03-15 |
| 6864037 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +4 more | 2005-03-08 |
| 6861197 | Polymers, resist compositions and patterning process | Jun Watanabe, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo +5 more | 2005-03-01 |
| 6855477 | Chemically amplified resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-02-15 |
| 6835524 | Polymers, chemical amplification resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe | 2004-12-28 |
| 6824955 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2004-11-30 |
| 6790586 | Resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe, Yoshio Kawai, Masaru Sasago, Masayuki Endo +5 more | 2004-09-14 |