Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8933251 | Fluorinated monomer of cyclic acetal structure, polymer, resist protective coating composition, resist composition, and patterning process | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Yuji Harada, Jun Hatakeyama +2 more | 2015-01-13 |
| 8431323 | Fluorinated monomer of cyclic acetal structure, polymer, resist protective coating composition, resist composition, and patterning process | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Yuji Harada, Jun Hatakeyama +2 more | 2013-04-30 |
| 8158330 | Resist protective coating composition and patterning process | Yuji Harada, Jun Hatakeyama, Koji Hasegawa | 2012-04-17 |
| 8101335 | Resist composition and patterning process | Yuji Harada, Jun Hatakeyama, Kazunori Maeda, Koji Hasegawa | 2012-01-24 |
| 8062831 | Carboxyl-containing lactone compound, polymer, resist composition, and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeshi Kinsho, Seiichiro Tachibana, Takeru Watanabe | 2011-11-22 |
| 7833694 | Lactone-containing compound, polymer, resist composition, and patterning process | Koji Hasegawa, Katsuhiro Kobayashi, Tsunehiro Nishi, Takeshi Kinsho | 2010-11-16 |