Issued Patents All Time
Showing 101–125 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693382 | Frame-supported pellicle for dustproof protection of photomask in photolithography | Yuichi Hamada, Satoshi Kawakami, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida | 1997-12-02 |
| 5691088 | Pellicle for protection of photolithographic mask | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Yuichi Hamada, Kimitaka Kumagae | 1997-11-25 |
| 5643483 | Ceramic heater made of fused silica glass having roughened surface | Hiroshi Mogi | 1997-07-01 |
| 5616927 | Frame-supported pellicle for dustproof protection of photomask | Satoshi Kawakami, Yuichi Hamada, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida | 1997-04-01 |
| 5607541 | Electrostatic chuck | Makoto Kawai | 1997-03-04 |
| 5597669 | Frame-supported pellicle for photolithography | Yuichi Hamada, Meguru Kashida | 1997-01-28 |
| 5576417 | Method for synthesizing aromatic polymers | Kazuhiko Takeuchi, Takaaki Hanaoka, Takehiko Matsuzaki, Yoshihiro Sugi, Tatsuya Eto +2 more | 1996-11-19 |
| 5574904 | Database management system in an intelligent network using a common request data format | Hideo Yunoki | 1996-11-12 |
| 5497032 | Semiconductor device and lead frame therefore | Kazuto Tsuji, Yoshiyuki Yoneda, Hideharu Sakoda, Michio Sono, Ichiro Yamaguchi +5 more | 1996-03-05 |
| 5470621 | Frame-supported pellicle for dustproof protection of photomask | Meguru Kashida, Toru Shirasaki, Yuichi Hamada, Yoshihiko Nagata, Sakae Kawaguchi | 1995-11-28 |
| 5419972 | Frame-supported pellicle for dustproof protection of photomask | Sakae Kawaguchi, Yuichi Hamada, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida | 1995-05-30 |
| 5382469 | Ceramic-titanium nitride electrostatic chuck | Makoto Kawai, Shinji Kojima, Ken-ichi Arai | 1995-01-17 |
| 5378514 | Frame-supported pellicle for photolithography | Yuichi Hamada, Yoshihiko Nagata, Meguru Kashida | 1995-01-03 |
| 5370951 | Frame-supported pellicle for protection of photolithographic mask | Meguru Kashida, Yuichi Hamada, Hirofumi Kishita, Shinichi Sato, Kouichi Yamaguchi | 1994-12-06 |
| 5368675 | Method for the preparation of a frame-supported pellicle for photolithography | Yuichi Hamada, Yoshihiko Nagata, Meguru Kashida | 1994-11-29 |
| 5350720 | Triple-layered ceramic heater | Nobuo Kawada, Kesazi Harada, Kenji Itou | 1994-09-27 |
| 5327808 | Method for the preparation of a frame-supported pellicle for photolithography | Yoshihiko Nagata, Yuichi Hamada, Meguru Kashida | 1994-07-12 |
| 5324053 | Electrostatic chuck | Makoto Kawai, Shinji Kojima | 1994-06-28 |
| 5308567 | Method for the preparation of a resin membrane | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi | 1994-05-03 |
| 5300348 | Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Yuichi Hamada, Shinichi Sato +1 more | 1994-04-05 |
| 5286567 | Pellicle for photolithographic mask | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi | 1994-02-15 |
| 5254419 | Method for dust-proofing in the manufacture of electronic devices and pellicle therefor | Meguru Kashida, Satoshi Watanabe, Toshinobu Ishihara, Ikuo Fukui | 1993-10-19 |
| 5246802 | X-ray permeable membrane for X-ray lithographic mask | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi | 1993-09-21 |
| 5234742 | Pellicle for lithography | Etsuo Hatano, Akira Yamamoto, Toyohisa Sakurada, Masaaki Iguchi | 1993-08-10 |
| 5221355 | Silicon carbide film forming apparatus | Toshiyasu Ohashi, Kesazi Harada, Takesi Satoh | 1993-06-22 |