Issued Patents All Time
Showing 126–135 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5209996 | Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same | Meguru Kashida, Yoshihiko Nagata | 1993-05-11 |
| 5199055 | X-ray lithographic mask blank with reinforcement | Hitoshi Noguchi, Yoshihiko Nagata, Meguru Kashida | 1993-03-30 |
| 5169440 | Silicon carbide membrane for X-ray lithography and method for the preparation thereof | Satoshi Okazaki | 1992-12-08 |
| 5118573 | Magneto-optical recording medium | Yoshio Tawara, Katsushi Tokunaga, Tadao Nomura, Yoshiaki Shimizu, Meguru Kashida | 1992-06-02 |
| 5098515 | Method for the preparation of a silicon carbide-silicon nitride composite membrane for X-ray lithography | Meguru Kashida, Yoshihiko Nagata | 1992-03-24 |
| 5089085 | Silicon carbide membrane for X-ray lithography and method for the prepartion thereof | Meguru Kashida, Yoshihiko Nagata | 1992-02-18 |
| 4929572 | Dopant of arsenic, method for the preparation thereof and method for doping of semiconductor therewith | Shigeaki Saito, Toshiharu Matsueda, Masaaki Iguchi | 1990-05-29 |
| 4775565 | Vessel for refractory use having multi-layered wall | Isao Yanagisawa, Ryoji Iwai | 1988-10-04 |
| 4734386 | Boron nitride dopant source for diffusion doping | Kenji Itoh | 1988-03-29 |
| 4395512 | Polyphenylenesulfide resin composition | Osamu Kuriyama | 1983-07-26 |