Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5470621 | Frame-supported pellicle for dustproof protection of photomask | Meguru Kashida, Toru Shirasaki, Yuichi Hamada, Yoshihiko Nagata, Yoshihiro Kubota | 1995-11-28 |
| 5419972 | Frame-supported pellicle for dustproof protection of photomask | Yuichi Hamada, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1995-05-30 |