Issued Patents All Time
Showing 76–88 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413695 | Resist compositions and patterning process | Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima, Jun Hatakeyama | 2002-07-02 |
| 6403822 | Ester compounds having alicyclic structure and method for preparing same | Takeru Watanabe, Koji Hasegawa, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-06-11 |
| 6403823 | Ester compounds having alicyclic structure and method for preparing same | Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-06-11 |
| 6399274 | Resist composition and patterning process | Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe, Jun Hatakeyama | 2002-06-04 |
| 6312867 | Ester compounds, polymers, resist compositions and patterning process | Takeshi Kinsho, Hideshi Kurihara, Koji Hasegawa, Takeru Watanabe, Osamu Watanabe +3 more | 2001-11-06 |
| 6284429 | Ester compounds, polymers, resist compositions and patterning process | Takeshi Kinsho, Hideshi Kurihara, Mutsuo Nakashima, Koji Hasegawa, Takeru Watanabe | 2001-09-04 |
| 6280898 | Lactone-containing compounds, polymers, resist compositions, and patterning method | Koji Hasegawa, Takeshi Kinsho, Jun Hatakeyama, Osamu Watanabe | 2001-08-28 |
| 6274286 | Resist compositions | Jun Hatakeyama, Takeshi Nagata, Shigehiro Nagura | 2001-08-14 |
| 6147249 | Ester compounds, polymers, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima, Koji Hasegawa, Jun Hatakeyama | 2000-11-14 |
| 6048661 | Polymeric compounds, chemically amplified positive type resist materials and process for pattern formation | Jun Hatakeyama, Shigehiro Nagura, Toshinobu Ishihara | 2000-04-11 |
| 6030746 | Di- and triphenyl monoterpene hydrocarbon derivatives, dissolution inhibitors, and chemically amplified positive resist compositions | Takeshi Nagata, Satoshi Watanabe, Jun Hatakeyama, Shigehiro Nagura, Toshinobu Ishihara | 2000-02-29 |
| 6027854 | Polymers chemically amplified positive resist compositions, and patterning method | Osamu Watanabe, Satoshi Watanabe, Shigehiro Nagura, Toshinobu Ishihara | 2000-02-22 |
| 5856561 | Bisphenol carboxylic acid tertiary ester derivatives and chemically amplified positive resist compositions | Takesi Nagata, Satoshi Watanabe, Katsuya Takemura, Shigehiro Nagura, Akinobu Tanaka +1 more | 1999-01-05 |