Issued Patents All Time
Showing 201–225 of 261 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667145 | Resist composition and patterning process | Tsunehiro Nishi, Takeru Watanabe, Koji Hasegawa, Tomohiro Kobayashi, Jun Hatakeyama | 2003-12-23 |
| 6660448 | Polymer, resist composition and patterning process | Seiichiro Tachibana, Mutsuo Nakashima, Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe +1 more | 2003-12-09 |
| 6653044 | Chemical amplification type resist composition | Takanobu Takeda, Osamu Watanabe, Jun Watanabe, Jun Hatakeyama, Tsunehiro Nishi | 2003-11-25 |
| 6605408 | Resist composition and patterning process | Tsunehiro Nishi, Shigehiro Nagura, Tomohiro Kobayashi, Satoshi Watanabe | 2003-08-12 |
| 6596463 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-07-22 |
| 6586157 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-07-01 |
| 6566038 | Polymers, resist compositions and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana, Koji Hasegawa, Takeru Watanabe +1 more | 2003-05-20 |
| 6566037 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Jun Hatakeyama | 2003-05-20 |
| 6531627 | Ester compounds, polymers, resist compositions and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-03-11 |
| 6524765 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Takeru Watanabe, Jun Hatakeyama, Koji Hasegawa, Seiichiro Tachibana | 2003-02-25 |
| 6515150 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Seiichiro Tachibana, Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi +1 more | 2003-02-04 |
| 6515149 | Acetal compound, polymer, resist composition and patterning response | Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-02-04 |
| 6509135 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Jun Hatakeyama | 2003-01-21 |
| 6509481 | Tetrahydrofuran compounds having alicyclic structure | Koji Hasegawa, Takeru Watanabe | 2003-01-21 |
| 6500971 | Ester compounds having alicyclic and oxirane structures and method for preparing the same | Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-12-31 |
| 6500961 | Lactone compounds having alicyclic structure and their manufacturing method | Koji Hasegawa, Takeru Watanabe, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-12-31 |
| 6492089 | Polymer, resist composition and patterning process | Jun Hatakeyama, Mutsuo Nakashima, Koji Hasegawa | 2002-12-10 |
| 6492090 | Polymers, resist compositions and patterning process | Tsunehiro Nishi, Seiichiro Tachibana, Mutsuo Nakashima, Takeru Watanabe, Koji Hasegawa +1 more | 2002-12-10 |
| 6472543 | Lactone compounds having alicyclic structure and their manufacturing method | Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-10-29 |
| 6469220 | Tertiary alcohol compounds having an alicyclic structure | Koji Hasegawa, Takeru Watanabe | 2002-10-22 |
| 6448420 | Acid-decomposable ester compound suitable for use in resist material | Tsunehiro Nishi, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima, Jun Hatakeyama | 2002-09-10 |
| 6444396 | Ester compounds, polymers, resist composition and patterning process | Takeru Watanabe, Tsunehiro Nishi, Mutsuo Nakashima, Koji Hasegawa, Jun Hatakeyama | 2002-09-03 |
| 6413695 | Resist compositions and patterning process | Tsunehiro Nishi, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima, Jun Hatakeyama | 2002-07-02 |
| 6403822 | Ester compounds having alicyclic structure and method for preparing same | Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima, Seiichiro Tachibana, Tsunehiro Nishi +1 more | 2002-06-11 |
| 6403823 | Ester compounds having alicyclic structure and method for preparing same | Koji Hasegawa, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana, Tsunehiro Nishi +1 more | 2002-06-11 |