Issued Patents All Time
Showing 26–50 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9250523 | Resist composition and patterning process | Jun Hatakeyama, Kenji Funatsu | 2016-02-02 |
| 9235122 | Monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Koji Hasegawa | 2016-01-12 |
| 9213235 | Patterning process, resist composition, polymer, and monomer | Koji Hasegawa, Masayoshi Sagehashi, Tomohiro Kobayashi | 2015-12-15 |
| 9182668 | Patterning process, resist composition, polymer, and monomer | Koji Hasegawa, Masayoshi Sagehashi, Tomohiro Kobayashi | 2015-11-10 |
| 9164384 | Patterning process and resist composition | Masaki Ohashi, Masahiro Fukushima, Tomohiro Kobayashi, Chuanwen Lin | 2015-10-20 |
| 9091933 | Negative pattern forming process | Tomohiro Kobayashi, Jun Hatakeyama, Kenji Funatsu, Seiichiro Tachibana | 2015-07-28 |
| 9086625 | Resist composition and patterning process | Jun Hatakeyama, Kenji Funatsu | 2015-07-21 |
| 9081290 | Patterning process and resist composition | Jun Hatakeyama, Koji Hasegawa, Masayoshi Sagehashi, Kentaro Kumaki, Tomohiro Kobayashi | 2015-07-14 |
| 9057949 | Patterning process, resist composition, polymer, and polymerizable ester compound | Takeru Watanabe, Tomohiro Kobayashi, Jun Hatakeyama, Takeshi Kinsho | 2015-06-16 |
| 9046772 | Monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Koji Hasegawa | 2015-06-02 |
| 9029064 | Patterning process and resist composition | Jun Hatakeyama, Masayoshi Sagehashi, Takeru Watanabe | 2015-05-12 |
| 8999630 | Patterning process and resist composition | Jun Hatakeyama, Koji Hasegawa | 2015-04-07 |
| 8993222 | Pattern forming process | Jun Hatakeyama | 2015-03-31 |
| 8932803 | Pattern forming process | Jun Hatakeyama | 2015-01-13 |
| 8895231 | Patterning process and resist composition | Jun Hatakeyama | 2014-11-25 |
| 8877424 | Monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Jun Hatakeyama, Koji Hasegawa | 2014-11-04 |
| 8865390 | Patterning process and resist composition | Jun Hatakeyama, Koji Hasegawa | 2014-10-21 |
| 8822136 | Patterning process and resist composition | Jun Hatakeyama, Youichi Ohsawa | 2014-09-02 |
| 8790866 | Patterning process and resist composition | Jun Hatakeyama, Tomohiro Kobayashi | 2014-07-29 |
| 8741546 | Patterning process and resist composition | Jun Hatakeyama, Youichi Ohsawa, Masaki Ohashi | 2014-06-03 |
| 8741554 | Patterning process and resist composition | Jun Hatakeyama, Youichi Ohsawa, Masaki Ohashi | 2014-06-03 |
| 8703408 | Patterning process | Jun Hatakeyama, Koji Hasegawa | 2014-04-22 |
| 8617800 | Patterning process | Jun Hatakeyama, Yoshio Kawai | 2013-12-31 |
| 8507173 | Patterning process | Jun Hatakeyama | 2013-08-13 |
| 8507175 | Patterning process and resist composition | Jun Hatakeyama, Masaki Ohashi, Youichi Ohsawa | 2013-08-13 |