Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7794921 | Imaging post structures using x and y dipole optics and a single mask | Steven J. Radigan, Paul Wai Kie Poon, Michael Konevecki | 2010-09-14 |
| 7786015 | Method for fabricating self-aligned complementary pillar structures and wiring | Chun-Ming Wang, Steven J. Radigan, Christopher J. Petti, Steven Maxwell | 2010-08-31 |
| 7781269 | Triangle two dimensional complementary patterning of pillars | Chun-Ming Wang, Roy E. Scheuerlein | 2010-08-24 |
| 7759023 | Hybrid mask and method of making same | — | 2010-07-20 |
| 7682942 | Method for reducing pillar structure dimensions of a semiconductor device | Michael Chan, Paul Wai Kie Poon, Steven J. Radigan | 2010-03-23 |
| 7662521 | Method of mask making to prevent phase edge and overlay shift for chrome-less phase shifting mask | — | 2010-02-16 |
| 7635545 | Photomask features with interior nonprinting window using alternating phase shifting | — | 2009-12-22 |
| 7553611 | Masking of repeated overlay and alignment marks to allow reuse of photomasks in a vertical structure | Christopher J. Petti, Steven J. Radigan, Tanmay Kumar | 2009-06-30 |
| 7494765 | Method for patterning photoresist pillars using a photomask having a plurality of chromeless nonprinting phase shifting windows | — | 2009-02-24 |
| 7291562 | Method to form topography in a deposited layer above a substrate | Samuel V. Dunton | 2007-11-06 |
| 7172840 | Photomask features with interior nonprinting window using alternating phase shifting | — | 2007-02-06 |
| 7008866 | Large-scale trimming for ultra-narrow gates | Ming-Jie Huang, Shu-Chih Yang, Huan-Just Lin, Hun-Jan Tao | 2006-03-07 |