Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11591495 | Neutral to alkaline chemical mechanical polishing compositions and methods for tungsten | Yi Guo | 2023-02-28 |
| 10995238 | Neutral to alkaline chemical mechanical polishing compositions and methods for tungsten | Yi Guo | 2021-05-04 |
| 10861702 | Controlled residence CMP polishing method | John Nguyen, Jeffrey James Hendron, Jeffrey Robert Stack | 2020-12-08 |
| 10857647 | High-rate CMP polishing method | John Nguyen, Jeffrey James Hendron, Jeffrey Robert Stack | 2020-12-08 |
| 10857648 | Trapezoidal CMP groove pattern | John Nguyen, Jeffrey James Hendron, Jeffrey Robert Stack | 2020-12-08 |
| 10777418 | Biased pulse CMP groove pattern | John Nguyen, Jeffrey James Hendron, Jeffrey Robert Stack | 2020-09-15 |
| 10586708 | Uniform CMP polishing method | John Nguyen, Jeffrey James Hendron, Jeffrey Robert Stack | 2020-03-10 |
| 10092998 | Method of making composite polishing layer for chemical mechanical polishing pad | Bainian Qian, Teresa Brugarolas Brufau, Julia Kozhukh, David Michael Veneziale, Yuhua Tong +6 more | 2018-10-09 |
| 10011002 | Method of making composite polishing layer for chemical mechanical polishing pad | Bainian Qian, Teresa Brugarolas Brufau, Julia Kozhukh, David Michael Veneziale, Yuhua Tong +6 more | 2018-07-03 |
| 9776300 | Chemical mechanical polishing pad and method of making same | Bainian Qian, Julia Kozhukh, Teresa Brugarolas Brufau, David Michael Veneziale, Yuhua Tong +7 more | 2017-10-03 |
| 9630293 | Chemical mechanical polishing pad composite polishing layer formulation | Bainian Qian, Julia Kozhukh, Teresa Brugarolas Brufau, Diego Lugo, George C. Jacob +3 more | 2017-04-25 |
| 9586305 | Chemical mechanical polishing pad and method of making same | Bainian Qian, Julia Kozhukh, Teresa Brugarolas Brufau, David Michael Veneziale, Yuhua Tong +7 more | 2017-03-07 |
| 6602112 | Dissolution of metal particles produced by polishing | Vikas Sachan, David Gettman, Terence M. Thomas, Craig Lack, Peter A. Burke | 2003-08-05 |