Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146036 | Semiconductor wafer inspection using care area group-specific threshold settings for detecting defects | Parul Dhagat, Ananthan Raghunathan, Dmitry Vengertsev | 2018-12-04 |
| 7270762 | Polishing compositions for noble metals | Hongyu Wang, Terence M. Thomas, Qianqiu Ye, Heinz Reinhardt | 2007-09-18 |
| 6699299 | Composition and method for polishing in metal CMP | Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack, Terence M. Thomas +3 more | 2004-03-02 |
| 6693035 | Methods to control film removal rates for improved polishing in metal CMP | Peter A. Burke, Elizabeth A. (Kegerise) Langlois, Keith G. Pierce | 2004-02-17 |
| 6616717 | Composition and method for polishing in metal CMP | Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack, Terence M. Thomas +3 more | 2003-09-09 |
| 6602112 | Dissolution of metal particles produced by polishing | Tony Quan Tran, David Gettman, Terence M. Thomas, Craig Lack, Peter A. Burke | 2003-08-05 |
| 6447373 | Chemical mechanical polishing slurries for metal | Craig Lack, Qiuliang Luo, Qianqiu (Christine) Ye, Terence M. Thomas, Peter A. Burke | 2002-09-10 |