Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699299 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Keith G. Pierce, Craig Lack, Terence M. Thomas +3 more | 2004-03-02 |
| 6676718 | Polishing of semiconductor substrates | Qiuliang Luo, Kelly Block | 2004-01-13 |
| 6616717 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Keith G. Pierce, Craig Lack, Terence M. Thomas +3 more | 2003-09-09 |
| 6475069 | Control of removal rates in CMP | Terence M. Thomas, Joseph So, Peter A. Burke | 2002-11-05 |
| 6447373 | Chemical mechanical polishing slurries for metal | Craig Lack, Qiuliang Luo, Vikas Sachan, Terence M. Thomas, Peter A. Burke | 2002-09-10 |