Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699299 | Composition and method for polishing in metal CMP | Vikas Sachan, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack, Terence M. Thomas +3 more | 2004-03-02 |
| 6693035 | Methods to control film removal rates for improved polishing in metal CMP | Vikas Sachan, Peter A. Burke, Keith G. Pierce | 2004-02-17 |
| 6616717 | Composition and method for polishing in metal CMP | Vikas Sachan, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack, Terence M. Thomas +3 more | 2003-09-09 |
| 6561891 | Eliminating air pockets under a polished pad | Stanley E. Eppert, Jr., Adam W. Manzonie, Peter W. Freeman | 2003-05-13 |