Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9201030 | Method and system for non-destructive distribution profiling of an element in a film | Bruno W. Schueler, David A. Reed, Michael Kwan, David S. Ballance | 2015-12-01 |
| 8610059 | Method and system for non-destructive distribution profiling of an element in a film | Bruno W. Schueler, David A. Reed, Michael Kwan, David S. Ballance | 2013-12-17 |
| 8269167 | Method and system for non-destructive distribution profiling of an element in a film | Bruno W. Schueler, David A. Reed, Michael Kwan, David S. Ballance | 2012-09-18 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7884321 | Method and system for non-destructive distribution profiling of an element in a film | Bruno W. Schueler, David A. Reed, Michael Kwan, David S. Ballance | 2011-02-08 |
| 7663753 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2010-02-16 |
| 7411188 | Method and system for non-destructive distribution profiling of an element in a film | Bruno W. Schueler, David A. Reed, Michael Kwan, Dave Ballance | 2008-08-12 |
| 7379183 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +6 more | 2008-05-27 |
| 7317531 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +10 more | 2008-01-08 |