Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Composite edge ring

Composite edge ring

US Patent D797691 · Granted Sep 19, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for delivering a plurality of waveform signals during plasm2025
Plasma processing chambers configured for tunable substrate and edge sheath cont2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Apparatus and method for controlling edge ring variation2025
Condition selectable backside gas2025
Plasma uniformity control in pulsed DC plasma chamber2025
Methods and apparatus for conductance liners in semiconductor process chambers2025
Circuits for edge ring control in shaped dc pulsed plasma process device2025
Bias voltage modulation approach for SiO/SiN layer alternating etch process2025