Ground return for plasma processes

Assignee

• Applied Materials

Inventors

• Soo Young Choi (176 patents)
• Robin L. Tiner (61 patents)
• Shinichi Kurita (132 patents)
• John M. White (252 patents)
• Carl A. Sorensen (62 patents)
• Jeffrey A. Kho (5 patents)
• Suhail Anwar (53 patents)
• Makoto Inagawa (37 patents)
• Gaku Furuta (32 patents)

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