CVD flowable gap fill

Assignee

• Novellus Systems

Inventors

• Feng Wang (12 patents)
• Victor Lu (57 patents)
• Brian Lu (19 patents)
• Wai-Fan Yau (60 patents)
• Nerissa Draeger (25 patents)
• Vishal Gauri (18 patents)
• Raashina Humayun (70 patents)
• Michal Danek (93 patents)
• Bart van Schravendijk (12 patents)
• Lakshminarayana Nittala (5 patents)

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