Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus

Lithographic apparatus

US Patent 9229340 · Granted Jan 5, 2016

Estimated economic value: $2,770,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Computational metrology2025
Temperature conditioning system, a lithographic apparatus and a method of temper2025
Methods and patterning devices and apparatuses for measuring focus performance o2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Method for controlling a lithographic apparatus and associated apparatuses2025
Wavelength tracking system, method to calibrate a wavelength tracking system, li2025
Lithographic apparatus and method2025
Lithographic apparatus and method2025
Method of determining control parameters of a device manufacturing process2025
System and method for scanning a sample using multi-beam inspection apparatus2024
Imprint apparatus with movable stages2024
Lithographic apparatus and device manufacturing method2024