Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method

Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method

US Patent 8795032 · Granted Aug 5, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for producing halogen oxyacid solution2025
AM apparatus for manufacturing a fabricated object and method for testing an irr2025
Chemical supply apparatus, cleaning system, and chemical supply method2025
Vehicle recording device and information recording method2025
Transfer apparatus, cleaning module, and substrate processing apparatus2025
Image forming apparatus with a stopper to block insertion of a toner container2025
Information processing system, information processing method, program, and subst2025
Substrate cleaning apparatus and substrate cleaning method2025
Imprint apparatus and product manufacturing method2025
Rubber membrane having first and second hardness for use in a polishing head2025
Substrate processing apparatus2025
Break-in processing apparatus and break-in processing method2025